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1

Influence of slurry components on copper CMP performance in alkaline slurry

Xu, Qinzhi, Chen, Lan, Yang, Fei, Cao, He

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 3.21 MB

english, 2017

2

A Chemical Mechanical Planarization Model Including Global Pressure Distribution and Feature Size Effects

Yang, Ziwei, Xu, Qinzhi, Chen, Lan

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2016

Language:

english

File:

PDF, 1.88 MB

english, 2016

3

A Wafer-Scale Material Removal Rate Model for Chemical Mechanical Planarization

Xu, Qinzhi, Chen, Lan, Cao, He

Journal:

ECS Journal of Solid State Science and Technology

Year:

2019

Language:

english

File:

PDF, 4.24 MB

english, 2019

4

A Feature-Scale Greenwood–Williamson Model for Metal Chemical Mechanical Planarization

Qinzhi Xu, Lan Chen

Journal:

Journal of Electronic Materials

Year:

2013

Language:

english

File:

PDF, 618 KB

english, 2013

5

A chemical mechanical planarization model for aluminum gate structures

Xu, Qinzhi, Chen, Lan, Fang, Jingjing, Yang, Fei

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 870 KB

english, 2015

6

Integral equation theory for atactic polystyrene nanocomposite melts with a multi-site model

Xu, Qinzhi, Chen, Lan

Journal:

The Journal of Chemical Physics

Year:

2014

Language:

english

File:

PDF, 1.80 MB

english, 2014

7

Structure and effective interactions of comb polymer nanocomposite melts

Xu, Qinzhi, Xu, Mengjin, Feng, Yancong, Chen, Lan

Journal:

The Journal of Chemical Physics

Year:

2014

Language:

english

File:

PDF, 1.79 MB

english, 2014

8

A chip-scale chemical mechanical planarization model for copper interconnect structures

Xu, Qinzhi, Fang, Jingjing, Chen, Lan

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 3.56 MB

english, 2016

9

Phase separation of comb polymer nanocomposite melts

Xu, Qinzhi, Feng, Yancong, Chen, Lan

Journal:

Year:

2016

Language:

english

File:

PDF, 3.22 MB

english, 2016

10

Integral equation prediction of structure of nanocomposites with polymer-grafted nanoparticles near solid surface

Xu, Qinzhi, Chen, Lan

Journal:

Year:

2016

Language:

english

File:

PDF, 1.32 MB

english, 2016

11

Integral Equation Prediction of the Structure of Alternating Copolymer Nanocomposites near a Substrate

Xu, Qinzhi, Chen, Lan, Yang, Fei, Cao, He

Journal:

Year:

2018

Language:

english

File:

PDF, 2.36 MB

english, 2018

12

An Oxide Chemical Mechanical Planarization Model for HKMG Structures

Chen, Lan, Xu, Qinzhi, Yang, Fei, Sun, Yan, Liu, Hongwei

Journal:

ECS Journal of Solid State Science and Technology

Year:

2018

Language:

english

File:

PDF, 757 KB

english, 2018

13

Effect of Non-Ionic Surfactant on Chemical Mechanical Planarization Performance in Alkaline Copper Slurry

Xu, Qinzhi, Yang, Fei, Chen, Lan, Cao, He

Journal:

International Journal of Precision Engineering and Manufacturing

Year:

2018

Language:

english

File:

PDF, 1.06 MB

english, 2018

14

A Material Removal Rate Model for Tungsten Chemical Mechanical Planarization

Xu, Qinzhi, Chen, Lan, Liu, Jianyun, Cao, He

Journal:

ECS Journal of Solid State Science and Technology

Year:

2019

File:

PDF, 612 KB

2019

15

A Wafer-Scale Material Removal Rate Model for Chemical Mechanical Planarization

Xu, Qinzhi, Chen, Lan, Cao, He

Journal:

ECS Journal of Solid State Science and Technology

Year:

2019

File:

PDF, 4.24 MB

2019